High-power ultraviolet (uv) and vacuum ultraviolet (vuv) lamps with micro-cavity plasma arrays

ABSTRACT

A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate&#39;s edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a Continuation of U.S. patent application Ser. No.16/312,540, filed on Dec. 21, 2018, which is a 35 U.S.C. § 371 nationalphase application of International Application Serial No.PCT/US2016/039488, filed Jun. 27, 2016, designating the United Statesand published in English, the entire contents of which are herebyincorporated herein by reference.

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT

This invention was made with Government support under Award No.DE-SC0007698, awarded by the Small Business Innovative Research Program,U.S. Department of Energy. The Government has certain rights in thisinvention.

FIELD

This disclosure relates generally to plasma devices emitting radiationin the ultraviolet (UV) and vacuum ultraviolet (VUV) regions of theelectromagnetic spectrum. More specifically, this disclosure relates toplasma lamps and products formed from plasma lamps, as well as a methodof manufacturing the same.

BACKGROUND

The statements in this section merely provide background informationrelated to the present disclosure and may not constitute prior art.

Ultraviolet (UV) and vacuum ultraviolet (VUV) radiation is generallydefined to encompass the 200-400 nm and 100-200 nm wavelength regions,respectively, of the electromagnetic spectrum. Because the energies ofVUV photons, for example, can be as large as approximately 12.5 eV,UV/VUV radiation is capable of initiating photochemical reactions thatare inaccessible to optical sources emitting radiation of longerwavelengths and, therefore, lower photon energies. Since the strengthsof many of the most important chemical bonds (e.g., C—H, O—H, etc.) areless than 10 eV, the commercial application of photochemical reactionshinges on the development of efficient and powerful sources of UV andVUV radiation.

Photochemical reactions that occur in the UV spectral region areresponsible for many processes that have considerable medical andindustrial value. Examples of such processes include the synthesis ofVitamin D and three-dimensional (3D) printing or stereolithography. DeepUV/VUV radiation is also effectively used to deactivate biologicalpathogens, disinfect water, clothing, and other surfaces, and desorbcontaminants and hydrocarbons from otherwise clean surfaces, such asequipment devoted to semiconductor device fabrication. In addition, theuse of UV radiation to disinfect a wound or surgical incision isbelieved to accelerate the healing process and hinder the occurrence ofhospital-acquired infections.

Most applications that use UV/VUV radiation owe their existence to thedevelopment of incoherent optical sources that emit radiation atwavelengths lying between about 185 nm and 350 nm. Although lasers arepresently available at several wavelengths that fall within thisspectral region (e.g., F₂=157 nm; ArF=193 nm, KrCl=222 nm, KrF=248 nm,and XeCl=308 nm), these lasers offer little benefit in most industrialand medical applications due to their optical coherence, physicallylarge size, cost (capital and operating), and inefficiency. For example,an argon fluoride (ArF) laser capable of producing 10 W of average powerat 193 nm (100 mJ/pulse, operating at a pulse repetition frequency (PRF)of 100 Hz) is a formidable system. This type of laser is also quitelarge, expensive, heavy and, at a PRF of 100 Hz, requires maintenanceafter every few hundred hours of operation. In addition, the mean timebetween failure (MTBF) for commercial systems incorporating conventionallasers is generally limited by the laser itself. Therefore, althoughUV/VUV lasers have proven to be pivotal to several medical applications(such as the corneal refractive correction procedure known as LASIK, andthe treatment of psoriasis), for example, lamps are the preferredsolution for industrial applications if the requisite power andefficiency are available at the desired wavelength.

Despite the commercial potential of UV/VUV photochemistry, disinfection,and decontamination, the applications of 100-400 nm radiation have thusfar been constrained by the generally low output powers available fromconventional lamps. Because the optical power delivered by any UV/VUVlamp translates directly into the rate at which a photochemical ordisinfection process proceeds, it is essential that lamps scalable to atleast 1-10 W of average power be available in order for industrial andbiomedical photochemical processes to reach their full potential.Indeed, the realization of high power, efficient lamps in the 100-400 nmwavelength region is expected to open the door to numerous commercialproducts and processes (requiring 3-12.5 eV photons) that were simplynot accessible previously. Furthermore, it is desirable that thespectral breadth of the radiation emitted by such lamps be narrow (lessthan ˜10 nm) because photochemical processes are renowned for theirspecificity. In other words, a photon of a given wavelength has aspecific energy and, therefore, the absorption of a photon by aninorganic or biological molecule yields a product distribution that isalso precisely defined. Expanding the spectral bandwidth to, forexample, tens of nanometers negates the advantage associated withoptically-driven chemical processes and will often result in adverse orcompeting effects. For example, the phototherapeutic treatment ofpsoriasis is known to be characterized by a narrow “action spectrum”centered at 308 nm. Irradiating human tissue with photons havingwavelengths more than 1-2 nm from this spectral position may be harmfulto the patient.

Unfortunately, few commercially-available UV/VUV lamps satisfy bothexpectations with regard to requirements for average power and spectralbandwidth. A high pressure Hg lamp, for example, is capable of emittingkilowatts of optical power but does so over a broad spectral range(typically 250-580 nm) that does not extend into the VUV region. Incontrast, a low-pressure (or “resonance”) Hg lamp emitting at 184.9 nmand 253.7 nm typically generates considerably less than tens of watts ofaverage optical power. Furthermore, the deuterium (D₂) molecular lampemits over a large spectral range and produces little power (<10 W).Another drawback of conventional UV/VUV lamps is their form factor.Generally available in the form of a cylinder, such lamps requireexpensive reflectors or other optics in order to maximize the efficiencyfor delivering the UV/VUV radiation to a surface, and for producing aspatially uniform distribution of intensity at that surface.

U.S. Pat. No. 8,900,027 describes a lamp that includes a first andsecond lamp substrate with a first and second external electrode,respectively, and a first and second internal phosphor coating,respectively. The first phosphor coating is a phosphor monolayer. Themethod of manufacturing a lamp includes screen-printing a phosphormonolayer on a first lamp substrate; screen-printing a phosphor layer ona second lamp substrate; joining the phosphor coated faces of the firstand second lamp substrates together with a seal; and joining a first andsecond electrode to the uncoupled exterior faces of the first and secondlamp substrates, respectively.

U.S. Pat. No. 6,762,556 describes an open chamber photoluminescent lamp.The photoluminescent planar lamp is gas-filled and containsphotoluminescent materials that emit visible light when the gas emitsultraviolet energy in response to a plasma discharge. The lamp comprisesfirst and second opposing plates manufactured from a glass materialhaving a loss tangent 0.05%.

U.S. Publication No. 2002/036461 describes a discharge device foroperation in a gas at a prescribed pressure that includes a cathodehaving a plurality of micro hollows therein, and an anode spaced fromthe cathode. Each of the micro hollows has dimensions selected toproduce a micro hollow discharge at the prescribed pressure. Preferably,each of the micro hollows has a cross-sectional dimension that is on theorder of the mean free path of electrons in the gas.

SUMMARY

The present disclosure generally provides a plasma lamp comprising,consisting of, or consisting essentially of two or more internal plateseach having an interior surface and an exterior surface that arepositioned approximately parallel to one another. At least one array ofmicrocavities is formed in the interior surface of at least one of theinternal plates. Optionally, one or more spacers may be located betweenthe interior surfaces of the internal plates, such that the spacersmaintain the separation between the internal plates at a predetermineddistance. If the spacers are present, at least one spacer is a peripheryspacer, placed near the edge of the internal plates so as to form ahermetic seal with the internal plates, thereby creating a fixed volumebetween the internal plates. A gas occupies the volume between theinternal plates and is in contact with the array of microcavities. Aplurality of electrodes is connected to a power supply designed todeliver a time-varying voltage. At least one electrode is located on theexterior surface of each internal plate. Optionally, one or moreprotective windows may be placed on the opposite side of at least oneelectrode in order to assist in providing environmental protectionthereto. The time-varying voltage interacts with the gas, such that aspatially uniform, glow discharge (plasma) is formed both within themicrocavities and the fixed volume between the internal plates (whenspacers are present). The glow discharge (plasma) emits radiation thatis in the UV/VUV spectral region, and the presence of microcavitiesimproves (by at least a factor of two) the efficiency and output powerof lamps having no microcavities but which are, in all other respects,identical to the microcavity-bearing lamp.

According to one aspect of the present disclosure, the microcavitiesexhibit at least one geometric shape. Each geometric shape exhibits apredetermined primary spatial width (w_(i)) that is in the range ofabout 3 μm to about 5,000 μm, and optionally, a spatial depth (d_(i))that is in the range of about 1 μm to about 1,000 μm (1 mm).Alternatively, d_(i) is between about 5 μm to about 600 μm, and w_(i) isbetween about 5 μm to about 1,500 μm. The geometric shape of themicrocavities may include, but are not limited to a hemisphere, acylinder, a half-cylinder, an ellipsoid, a truncated cone, a paraboloid,a truncated ellipsoid, or a cube.

When desirable, at least two different arrays of microcavities can belocated in the interior surface of at least one of the internal plates.The microcavities in the two (or more) arrays may exhibit a differentgeometric shape, different spatial dimensions, microcavity tomicrocavity spacing, or a combination thereof. The spatial dimensionsmay comprise one or more of depth (d_(i)) and width (w_(i)) as describedabove or further defined herein. The different arrays of microcavitiescan be spatially separated on the interior surface of the internalplate, or interlaced or interwoven, such that the microcavities in onearray are alternated or staggered with respect to the microcavities ofanother array.

The plasma lamp according to one aspect of the present disclosure isplanar and has a thickness that is about 6 mm or less. When desirable,the plasma lamp may comprise a curved surface. The plasma lamp exhibitsan electrical efficiency of at least 1%; alternatively, greater than10%; alternatively, between 1% and 10% with higher efficiencies (e.g.,approaching 20%) being possible. One or more of the internal plates andprotective windows in the plasma lamp are individually selected tocomprise a UV/VUV radiation transmissive material. In addition, at leastone of the plurality of electrodes exhibits a transparency to UV/VUVradiation of 90% or more, or the electrode geometry can be designed soas to have an “openness” or transmission above 90%. Each of theprotective windows is individually selected to be a plate or aprotective coating.

The gas may comprise one or more noble gases, one or more halogen gases,or a mixture of at least one halogen gas with the one or more noblegases. Depending on the desired radiation wavelengths, other gases orvapors (such as deuterium, Group-VI containing gases including hydrogensulfide and sulfur hexafluoride, or water vapor) are also suitablecandidates for producing UV/VUV radiation. When a plasma is formed inthe gas, gases, or gas/vapor mixture, molecules and/or atoms areproduced that emit UV/VUV radiation having a peak wavelength at whichmaximum intensity is generated. Examples of the molecules that can beproduced, and their peak wavelengths, include, without limitation, NeF*(108 nm), Ar₂* (126 nm), Kr₂* (146 nm), F₂* (157 nm), ArBr* (165 nm),Xe₂* (172 nm), ArCl* (175 nm), KrI* (190 nm), ArF* (193 nm), KrBr* (207nm), KrCl* (222 nm), KrF* (248 nm), XeI* (254 nm), Cl₂* (258 nm), XeBr*(282 nm), Br₂* (289 nm), ArD* (290-300 nm), XeCl* (308 nm), I₂* (342nm), or XeF* (351, 353 nm). When the gas is xenon and the UV/VUVradiation emitted from the Xe₂* excimer molecule has a peak wavelengthof about 172 nm, the average output intensity of the plasma lamp can begreater than 200 mW per cm² of lamp surface area, and the peak powergenerated by lamps of the present disclosure can be greater than 1 kW.

The spacers, when present, can be either part of a monolithic structurethat exhibits a predetermined spacer pattern or discrete structureshaving the shape of a disc, a sphere, a pellet, a cylinder, a cube, orthe like, as well as a mixture thereof. The spacers keep the platesseparated at a predetermined fixed distance and serve to maintain therelative position of the two inner plates so that they are substantiallyparallel to one another.

When desirable, the plasma lamp may further comprise a planar or curvedreflector or a reflecting surface, positioned at the rear surface of thelamp, so as to increase the total UV/VUV radiation produced out of thefront of the lamp. The reflector can be integrated with, or affixed to,the plasma lamp. The plasma lamp may also comprise a UV/VUV conversionphosphor layer located on the interior surface of at least one internalplate, serving to convert the UV/VUV spectrum naturally emitted by aspecific gas/vapor combination to another wavelength, or range ofwavelengths, better suited to a specific industrial application orprocess.

According to another aspect of the present disclosure, a product may berealized that comprises the plasma lamp of the present disclosure andproduces UV/VUV radiation for use in a predefined application. Thepredefined application may include, without limitation, disinfectingpotable water; disinfecting medical devices or clothing; deactivatingbiological pathogens; treating waste water; desorbing contaminants orhydrocarbons from a surface of a chamber or other component or systemused in a cleanroom environment; generating ozone near the air intake ofan internal combustion engine; curing a coating composition after it hasbeen applied to a surface of a substrate; or photolyzing a single gas orvapor, or a mixture of gases and vapors, so as to yield a gaseous orsolid product that is otherwise difficult to produce efficiently orinexpensively. When desirable, a commercial product may comprise aplurality of plasma lamps. The plurality of plasma lamps can be tiled inorder to exhibit an emitting surface that produces an average powerbetween (for example) 100 W and 10 kW in the UV/VUV spectral range.Optionally, the product can produce radiation simultaneously in two ormore wavelength ranges within the UV/VUV spectral region.

According to yet another aspect of the present disclosure, a method offorming a plasma lamp having a composite structure is provided. Thismethod generally comprises providing two or more internal plates. Eachof the internal plates has an interior surface and an exterior surface.At least one microcavity array is formed in the interior surface of atleast one of the internal plates. The interior surface of each internalplate is positioned such that it faces the interior surface of anotherinternal plate. Optionally, one or more spacers may be located betweenthe inner surfaces of the internal plates, such that the spacers keepthe internal plates separated by a predetermined fixed distance. Whenpresent, at least one spacer is a periphery spacer placed near the edgeof the internal plates so as to form a hermetic seal between theperiphery seal and the internal plates, thereby creating a fixed volumebetween the internal plates. A gas fill port is then formed that passesthrough at least one of the internal plates and the cavity is filledwith a gas or mixture of gases capable of producing a glow dischargeplasma. The gas is also in contact with the array of microcavities. Thegas fill port is then closed in order to seal the gas within the plasmalamp.

A plurality of electrodes is formed with at least one electrode beinglocated on the exterior surface of each internal plate. The plurality ofelectrodes is connected to a power supply designed to deliver atime-varying voltage. Optionally, one or more protective windows may beformed over at least one electrode; alternatively over each electrode.

The time-varying voltage is applied to the electrodes such that aspatially uniform, glow discharge plasma is formed within one or more ofthe microcavity arrays and in the volume between the internal plates (ifpresent). The glow discharge plasma emits radiation that is in theUV/VUV spectral region.

When desirable, forming the microcavity array comprises applying a maskhaving a desired microcavity array pattern to an interior surface of aninternal plate using, without limitation, a stamping or replica moldingprocess or a lithographic process. Subsequently, the microcavity arrayis formed in the interior surface of the internal plate using amicropowder ablation process, a laser ablation process, a drillingprocess, a chemical etching process, or the like-processes that arewell-known to artisans in the field.

The method further comprises applying a glass frit to both surfaces ofthe spacers that make contact with the inner surface of the interiorplates. The glass frit is designed for use in a firing process, suchthat a hermetic seal between the spacer and the interior surfaces of theinternal plates is accomplished. Before closing the gas fill port, themethod may further include operating the plasma lamp, evacuating the gasfrom the void volume, and refilling the void volume with a fresh amountof the gas. Optionally, the method may also comprise placing a getterwithin the plasma lamp in order to remove residual impurities. The lampmay also be heated in an oven during the gas evacuation/refill processso as to clean (“de-gas”) the lamp interior more quickly and thoroughly.

Further areas of applicability will become apparent from the descriptionprovided herein. It should be understood that the description andspecific examples are intended for purposes of illustration only, andare not intended to limit the scope of the present disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

The drawings described herein are for illustration purposes only and arenot intended to limit the scope of the present disclosure in any way.

FIG. 1A is a cross-sectional schematic representation of a plasma lampformed according to the teachings of the present disclosure;

FIG. 1B is a cross-sectional schematic representation of another aspectof a plasma lamp of the present disclosure;

FIG. 1C is a top-down perspective view of the plasma lamp of FIG. 1B;

FIG. 2A is an image of the emission generated by the plasma lamp ofFIGS. 1B-10 when the lamp is driven with a sinusoidal AC voltagewaveform;

FIG. 2B is an image of the emission from the plasma lamp of FIGS. 1B-1Cwhen the lamp is driven with a fast rise time, pulsed voltage waveform;

FIG. 3 is an optical micrograph of the emission generated by a portionof two interlaced microcavity arrays in the plasma lamp of FIGS. 1B-1C;

FIG. 4 is a graphical representation of the VUV spectrum (intensity as afunction of wavelength) produced by a lamp of the present disclosurehaving a Ne/Xe gas mixture;

FIG. 5 is a graphical representation of the total VUV output power, andoutput intensity, plotted as a function of the input electrical power,for a plasma lamp fabricated according to the teachings of the presentdisclosure;

FIGS. 6 (A, B) is a plan (top) view of one design of a microcavity arrayhaving microcavities of one size and shape;

FIGS. 6 (C, D) is a plan (top) view of another array design for a plasmalamp, showing tow interlaced arrays having microcavities of a singlecross-sectional shape in two sizes;

FIG. 6E is a plan (top) view of another microcavity array design for aplasma lamp, illustrating interlaced arrays with micro-cavities havingtwo distinct shapes in three sizes;

FIG. 7A is a cross-sectional schematic representation of a plasma lamphaving a dual-sided, staggered microcavity array;

FIG. 7B is a cross-sectional schematic representation of a plasma lamphaving an external electrode with a protective coating;

FIG. 7C is a cross-sectional schematic representation of a plasma lamplocated within a chamber filled with at least one discharge gas;

FIG. 8A is a cross-sectional, schematic representation of the plasmalamp of FIG. 7C, further including a secondary gas chamber;

FIG. 8B is a cross-sectional schematic representation of a plasma lampcomprising a UV conversion phosphor;

FIG. 9 is a graphical representation of the spectrum of the XeI (xenonmonoiodide) excimer generated by a lamp formed according to theteachings of the present disclosure;

FIG. 10 is a graphical representation of the spectrum produced by aVUV-to-UV conversion phosphor film, driven by xenon dimer emission at172 nm and coated onto an interior surface of a lamp of the presentdisclosure;

FIG. 11 is a schematic representation of a method for fabricating aplasma lamp according to the teachings of the present disclosure;

FIGS. 12(A-I) are schematic representations providing furtherillustration of the various process steps in the method of FIG. 11;

FIG. 13A is a cross-sectional diagram of a product comprising plasmalamps and used for the disinfection of water or the treatment ofwastewater;

FIG. 13B is a cross-sectional, perspective view of the product of FIG.14A;

FIGS. 14 (A, B) are cross-sectional diagrams of another systemcomprising plasma lamps formed according to the teachings of the presentdisclosure and designed for the treatment of liquid waste;

FIG. 15A is a cross-sectional, perspective view of a compact systemdesigned for disinfecting and/or treating water;

FIG. 15B is an enlarged cross-sectional view of the plasma lampcomponent in the compact system of FIG. 16A;

FIG. 16 is a cross-sectional view of a plasma lamp capable of providingradiation simultaneously in two or more VUV/UV/Visible wavelengthregions; and

FIG. 17 is a schematic diagram of a plasma lamp designed to generate O3(ozone) in the air intake of an internal combustion engine such as thatin an automobile.

DETAILED DESCRIPTION

The following description is merely exemplary in nature and is in no wayintended to limit the present disclosure or its applications. Forexample, the plasma lamps made and used according to the teachingscontained herein are described throughout the present disclosure asbeing flat or planar in geometry in order to more fully illustrate thelamps and the use thereof. However, the formation of a plasma lampcomprising the various features and elements defined herein thatincorporates or utilizes a different form factor, such as one thatincludes a curved surface, is also contemplated to be within the scopeof the present disclosure. It should be understood that throughout thedescription, corresponding reference numerals indicate like orcorresponding parts and features.

The present disclosure generally provides plasma lamps that are able togenerate watts of average power at discrete wavelengths within theultraviolet (UV) and vacuum ultraviolet (VUV) spectral ranges, extendingfrom approximately 100 nanometers to about 400 nanometers. For example,an output intensity above about 200 mW/cm² can be achieved reproduciblyand continuously from a plasma lamp that emits at 172 nm (hv=7.2 eV;Xe₂* is the emitter). This level of intensity corresponds to an averagepower of more than 20 W delivered from a 100 cm² (4″×4″) lamp that isgenerally flat and thin (e.g., ≤6 mm in thickness). In addition, thepeak power produced by this 172 nm plasma lamp is currently above 1 kWwhich is attractive for photochemical applications requiring thesimultaneous absorption of two or more photons by an atom or molecule.Furthermore, the volumes of lamps formed according to the teachings ofthe present disclosure are typically 3-4 orders of magnitude smallerthan a laser of the same average output power. Therefore, the lampsdescribed here are more powerful and efficient than virtually all of thelasers that have been developed since 1963 in the VUV spectral region,for example.

Referring to FIGS. 1A and 10, the plasma lamp 1 generally comprises,consists of, or consists essentially of two or more internal plates 5with each internal plate 5 having an interior surface 7 and an exteriorsurface 8 that is arranged so that the internal surface 7 of each plate5 is substantially parallel to one another. At least one of the plates 5should be highly transmissive at the wavelengths of the desired emissionfrom the lamp. At least one array 25 of microcavities 30 is formed inthe interior surface 7 of at least one of the internal plates 5.Optionally, one or more spacers 10 may be located between the interiorsurfaces 7 of the internal plates 5, such that the spacers 10 keep theinternal plates 5 separated at a predetermined fixed distance. Whenpresent, at least one spacer 10 is a periphery spacer 10 a that isplaced near the edge of the internal plates 5. The periphery spacer 10 aforms a hermetic seal with the internal plates 5 and creates a fixedvolume of space between the internal plates 5. A gas 13, in which a glowdischarge (plasma) is produced, occupies this volume of space. Thus, thegas 13 is also in contact with the array 25 of microcavities 30. Whendesirable, the plasma lamp 1 may be formed with no spacers being presentbetween the interior surfaces 7. In this type of design, the plasmadischarge is formed within the array of microcavities 30.

A plurality of electrodes 17 is connected to a power supply 18 that isdesigned to deliver a time-varying voltage. At least one electrode 17 islocated on the exterior surface 8 of each of the internal plates 5.Finally, one or more protective windows 20 may optionally be placed onthe opposite side of each electrode 17 in order to provide furtherenvironmental protection thereto. Such windows are not essential for theoperation of lamps of the present disclosure and, in fact, absorb afraction of the UV/VUV emission generated within the lamp. A portion ofthe lamp emission absorbed by the lamp windows is the result of colorcenters produced in the window material by the high intensitiescharacteristic of lamps of the present disclosure.

When the time-varying voltage interacts with the gas 13, a spatiallyuniform glow discharge (plasma) is formed both within the microcavities30 and the fixed volume between the internal plates 5. It is this glowdischarge plasma that emits the desired radiation 35 in the UV/VUVspectral region. It must be emphasized that the streamers characteristicof conventional dielectric barrier discharge lamps are absent orstrongly suppressed by lamps of the present disclosure. Thischaracteristic alone allows for these UV/VUV lamps to operate at highergas pressures (thereby generating larger output powers) whilemaintaining a spatially-homogeneous discharge within the lamp. Themicrocavity arrays fabricated within the lamp not only produce a uniformglow discharge but also stabilize the lamp, resulting in the productionof short (less than 100 ns) pulses of radiation that are essentiallyidentical for each cycle of the driving voltage waveform.

Conventional lamps that are in the shape of a bulb or cylinder generallyrequire the presence of optics to counteract the focusing of the UV/VUVradiation by the lamp envelope itself (which can behave as a lens). Inaddition, capturing the radiation that exits a conventional lamp indirections other than that desired for the intended application requirescollimating optics for this spectral region that are often expensive andfragile. In comparison, the plasma lamps of the present disclosureeliminate the expense of mating a cylindrical UV/VUV lamp withreflective or transmissive collimating or focusing optics. Plasma lampsthat are flat and thin may also be tiled so as to realize emittingsurfaces of several square meters in area (or more) that produce averagepowers exceeding 100-1000 W in the UV/VUV spectral region. Such powerlevels are unprecedented for lamps that are compact in size and emitradiation in a narrow band. This same statement also generally holdstrue for lasers that operate in the VUV region. In fact, only two VUVlasers—namely, ArF and F₂—are normally capable of generating Watts ofaverage power. However, neither of these lasers can be regarded as beingeither compact or inexpensive. Furthermore, the duty cycle of high powerUV/VUV lasers is typically on the order of 10⁽⁻⁶⁾ for a PRF of 100 Hz,whereas lamps of the present disclosure have already been operated atPRF values up to 135 kHz which corresponds to a duty cycle above 0.1%,or more than three orders of magnitude higher than that of most UV/VUVlasers.

The substantial increase in power measured for the plasma lamps formedaccording to the teachings of the present disclosure, relative to thepower measured for conventional lamps, occurs due to several factors.One of these is the presence of at least one array of microcavities inthe lamp. The microcavities serve the purpose of locally shaping theelectric field strength in the plasma that is responsible for producingthe desired UV/UVV radiation. Thus, the microcavities intensify thelocal electric field which has the result of more effectively producingthe electronically-excited atoms and molecules essential to producingthe desired UV/VUV radiation.

Still referring to FIG. 1A, microcavities 30 that comprise one or moregeometries are fabricated into an interior surface 7 of at least one ofthe internal plates 5 or windows of the lamp 1 through which theradiation produced by the lamp passes. The shape of the micro-cavitiesmay include, but not be limited to, a hemisphere, a cylinder, ahalf-cylinder, an ellipsoid, a truncated cone, a paraboloid, a truncatedellipsoid, and a cube. The microcavities 30 may exhibit differentspatial dimensions, center-to-center spacing (known as the pitch), or acombination thereof. The spatial dimensions may include one or more ofdepth (d_(i)) and width (w_(i)).

The microcavities 30 also provide the ability to enhance the efficiencyof the lamp. These microcavities 30 are effective at producingspatially-uniform glow discharges within the lamp, even at gas pressures13 at which conventional lamp technology generates only streamers thatare distributed statistically (in both space and time), within the lamp1. Other functions of the array 25 of microcavities 30, such as theimproved utilization of the voltage pulse powering the system, alsoprovide various benefits. In the absence of the array 25 ofmicrocavities 30 in the plasma lamp 1, the output power is measured tofall precipitously (by a factor of at least four in the case of a lamp 1that emits radiation at a peak wavelength of about 172 nm). According toone aspect of the present disclosure, at least one array 25 ofmicrocavities 30 is fabricated into a surface 7 of a plate 5 or windowthat is internal to the lamp 1, and oriented such that the plane inwhich the array resides is approximately parallel to another internalplate 5 or window of the lamp 1. Other aspects of the present disclosuredo not require that the two internal surfaces of the lamp be parallel.

Referring now to FIG. 1B, at least two arrays 25 a, 25 b ofmicrocavities 30 a, 30 b are fabricated into at least one internalsurface 5 of the plasma lamp 1. The second array 25 b is chosen to havemicrocavities 30 b with geometries and/or spatial dimensions that aredifferent from those of the microcavities 30 a constituting the firstarray 25 a. As shown in the specific example of FIG. 1B, the shape ofthe microcavities 30 a in the first array 25 a is hemispherical with aprimary spatial dimension (w_(a)), while the shape of the microcavities30 b in the second array 25 b is elliptical with a primary spatialdimension (w_(b)), wherein w_(b)<w_(a). The function of the second array25 b of microcavities 30 b is to form a plasma within each microcavity30 b at a threshold breakdown voltage level (BVL) that is different fromthe threshold BVL of the microcavities 30 a in the first array 25 a.When desirable, the different arrays 25 a, 25 b of microcavities 30 a,30 b may be spatially separated on the interior surface 7 of theinternal plate 5, or interlaced or interwoven, such that themicrocavities 30 a in one array 25 a are alternated or staggered withthe microcavities 30 b of another array 25 b.

One advantage associated with the design of the plasma lamp in thepresent disclosure is that the voltage waveform driving the lamp isutilized more effectively and efficiently by the light-generatingplasma, as compared to a lamp having internally a single array ofmicro-cavities, all of which are of the same geometry and spaced by thesame pitch. If chosen properly, interlaced arrays of microcavities areable to substantially enhance the efficiency of UV/VUV lamp emissionbecause the “power pulse” (I×V, where I and V represent the time-varyingcurrent and voltage waveforms, respectively) that drives the lamp ismore effectively utilized. That is, smaller diameter microcavities inone array, for example, will ignite (have plasma produced within them)at voltages higher than those required for larger microcavities(presuming the same gas and a constant pressure). Thus, havingmicrocavities of more than a single size and geometry is advantageouswith respect to utilization of the driving electrical waveform and,therefore, the efficiency of the lamp. In tests conducted over the pasttwo years, this conclusion has been confirmed by studies of multiplelamps, half of which did not have microcavities. Care was taken in thefabrication of the lamps without microcavities to ensure that theimprovement in lamp efficiency for the microcavity-bearing lamps was notthe result of thinning one or both of the internal plates 5. That is,the depth of the microcavities decreases, in effect, the thickness ofthe plates and so several lamps without microcavities were fabricatedwith an internal plate 5 thickness that compensated for this effect. Thedata consistently showed a factor of at least two (and, often, a factorof more than four) increase in the output power of lamps havingmicrocavity arrays, relative to lamps that did not incorporatemicrocavity arrays. Furthermore, dual cavity array lamps are moreefficient than single array lamps.

The planar plasma lamps of the present disclosure are capable ofemitting at multiple discrete wavelengths in the UV and VUV spectralregions, and do so with unprecedented levels of intensity. For example,a flat lamp that emits radiation at 172 nm (photon energy of 7.2 eV) inthe VUV spectral range through a single quartz internal plate or windowcan generate intensities ≥200 mW/cm². Intensities above 240 mW persquare cm of lamp surface area have been realized with considerablyhigher values possible upon optimization of the microcavity arraystructure, the gas mixture, and the spacer thickness. Although thedesign of a planar plasma lamp favors emission through a single internalplate or window, an emission intensity above 140 mW/cm² may also beemitted through a second internal plate or window. Therefore, a 100 cm²(4″×4″) plasma lamp can generate more than 20 W of average power throughthe single internal window alone. Such large power levels have not beenavailable previously nor has the flat form factor, and thickness, oflamps of the present disclosure been known previously. Existing,commercially-available 172 nm lamps, for example, generally emit amaximum intensity of 50 mW/cm² VUV radiation which is at least a factorof four smaller than intensities achieved with lamps of the presentdisclosure. As described above, removing the array(s) of microcavitiesfrom lamps of the present disclosure (e.g., the rest of the lampstructure otherwise remains the same) reduces the output intensity ofthe modified plasma lamps typically by at least a factor of two orthree.

The gas may comprise one or more noble gases, one or more halogen gases,or a mixture of at least one halogen gas with the one or more noblegases. The gas, when desired, may include other gases or vapors, such asone or more metal-halides, sodium, mercury, or sulfur, to name a few.Alternatively, the gas may comprise neon (Ne), xenon (Xe), or a mixturethereof with the ratio of Ne-to-Xe (Ne:Xe) ranging between 1:99 to 99:1;alternatively, 25:75 to 75:25; alternatively, between 40:60 to 60:40;alternatively, about 50:50. The pressure for the gas contained withinthe plasma lamp can range from about 100 Torr to well over oneatmosphere; alternatively, between 100 Torr and 760 Torr; alternatively,one atmosphere or more. Lamps designed to efficiently produce radiationfrom the Ar dimer at 126 nm, for example, are expected to have internalgas pressures of at least several bar (atmospheres).

When a plasma is produced within the microcavities, molecules are formedin electronic states that emit UV/VUV radiation having a peak wavelength(i.e., the wavelength corresponding to maximum intensity). Molecules ofparticular interest, and their associated peak wavelengths, include,without limitation, NeF* (108 nm), Are* (126 nm), Kr₂* (146 nm), F₂*(158 nm), ArBr* (165 nm), Xe₂* (172 nm), ArCl* (175 nm), KrI* (190 nm),ArF* (193 nm), KrBr* (207 nm), KrCl* (222 nm), KrF* (248 nm), XeI* (254nm), Cl₂* (258 nm), XeBr* (282 nm), Br₂* (289 nm), ArD* (290-300 nm),XeCl* (308 nm), I₂* (342 nm), or XeF* (351, 353 nm). When the gas isxenon and the UV/VUV radiation emitted from the Xe₂* excimer molecule isat a peak wavelength of about 172 nm, the average output intensity ofthe plasma lamp can be greater than 200 mW/cm² and the peak power can begreater than 1 kW.

Referring again to FIGS. 1A-1C, the main body of the plasma lamp 1comprises two interior flat plates 5 that are optionally separated byspacers 10. If the wavelength(s) of the light to be generated by thelamp is beyond approximately 300 nm, the plates can be fabricated from arelatively inexpensive glass, such as borosilicate glasses. However, if(as shown in FIG. 1B), the lamp is intended to produce radiation in thedeep-UV or VUV (wavelength λ<300 nm), then the two inner plates can befabricated from fused silica or quartz. Preferably, the fused silica (orquartz) is of high quality in that it exhibits low absorption at theemission wavelength(s). A primary cause of absorption by windowmaterials (such as fused silica or quartz) in the UV and VUV spectralregions is the formation of color centers. Alternatively, sapphire mayserve in this capacity, although sapphire is birefringent and generallyexpensive. Into at least one of the two internal plates 5 is fabricatedan array 25 of microcavities 30, each having a spatial depth (d_(i)) andwidth (w_(i)).

The spacers that are sometimes used to separate the internal plates afixed distance and to maintain the plates parallel to one another maybe, without limitation, either part of a monolithic structure thatexhibits a predetermined spacer pattern or discrete structures havingthe shape of a disc, a sphere, a pellet, a cylinder, a cube, or thelike, as well as a combination thereof. The distance between theinternal surfaces of the internal plates is predetermined by the size ofthe spacers utilized. The separation distance between the plates isbetween about 0 mm (when no spacers are used) to about 2.0 mm, but canalternatively be larger or smaller; alternatively, between about 0.6 and1.0 mm. The spacer positions are retained by any suitable mechanism,including but not limited to, the use of friction between the surface ofthe spacer and internal plate or by bonding through the use of aphosphor coating or other material, such as a frit.

The depth (d_(i)) of the microcavities generally range from about 1micrometer to 1,000 micrometers (μm); alternatively between about 5 μmand about 600 μm; alternatively, from about 10 μm to about 600 μm. Thespatial width (w_(i)) of the microcavities range from about 3 μm toabout 5,000 μm; alternatively between about 5 μm and about 1,500 μm,alternatively, from about 25 μm to about 500 μm. When at least twoarrays 25 a, 25 b of microcavities are fabricated into the lower of thetwo flat plates as shown in FIG. 1B, the two arrays can bedistinguishable in that the microcavities in each array may exhibitdifferent shapes, as well as depth (d_(a), d_(b)) and/or spatial width(w_(a), w_(b)) dimensions.

The breakdown voltage associated with a gas may scale with the productof the gas pressure (p) and the primary dimensions (d_(i), w_(i)) of themicrocavities. Therefore, for a fixed value of gas pressure, plasma willbe produced in microcavities, having different dimensional values, atdifferent values of the driving voltage. In effect, microcavities ofdiffering dimensions will ignite (generate plasma) at different valuesof voltage imposed across the lamp.

Still referring to FIGS. 1A-1C, electrical power is applied to theplasma lamp 1 by means of electrodes 17 applied to the outer surface 8of the two inner plates 5. The electrodes 17 can take on one of manyforms, such as a grid of narrow nickel films (lines) deposited onto theouter surface 8 of the plate 5 by evaporation, sputtering, or any otherdeposition process known in the art. Several specific examples ofmaterials that may be used as electrodes include, but are not limitedto, transparent conductive oxides (TCO) such as indium tin oxide (ITO),fluorine-doped tin oxide (FTO), or doped zinc oxide, among others; filmscomprising carbon nanotubes, graphene, or the like; transparentconducting polymers, such as poly(3, 4-ethylenedioxythiophene) [PEDOT],doped PEDOT, poly(4, 4-dioctylcyclo-pentadithiophene), or derivatives ofpolyacetylene, polyaniline, polypyrrole or polythiophene; or a patternedmetal or metal alloy, such as copper, gold, nickel, or platinum, to namea few.

The transparency through the electrode should be above 85%;alternatively, above 90% and, preferably, between 90% and about 97%. Inthe case of patterned metal lines, overall transparency (“openness”) iscalculated by comparing the lamp surface area occupied by the electrodeslines, as compared to the total emitting area of the lamp. The lamp 1assembly is completed by attaching two additional windows 20 to theexterior of the lamp 1 that cover the electrodes 17. These externalwindows 20 are provided as a safety precaution, but also serve thepurpose of protecting the electrodes 17 from exposure to theenvironment.

As further indicated in FIGS. 1A-1C, a through-channel or gas fill port15 (e.g., a circular hole) is also provided in one of the internalplates 5, as well as its associated outer window 20, in order to permitthe evacuation of air originally present within the fixed volumeenclosed by the plates 5 and spacers 10 in the lamp 1, as well asbackfilling of the lamp 1 with the desired gas(es) or vapors 13.Alternatively, the gas fill port is positioned through an internal platethat contains a microcavity array.

Since the structure of the plasma lamp is that of a dielectric barrierdischarge (DBD) device, the driving voltage should be time-varying.Specific examples of two voltage waveforms include, but are not limitedto, a 20 kHz sinusoid and bipolar pulses that have a rise time of <100nanoseconds (ns) and an adjustable PRF. When assembled, the plasma lamphas an overall thickness of typically about 6 mm or less.

When the internal plate 5 and the external window 20 of the plasma lampare made of a radiation transmissive material, UV/VUV radiation may betransmitted through the plate and window to the environment. Forexample, UV/VUV radiation may emerge from the plasma lamp through bothfaces of the lamp when all of the plates and windows are made of atransmissive material. Most of the optical radiation is emitted throughthe front face of the lamp (i.e., through the plate/window that isopposite to the window containing the array of microcavities). However,for lamps tested to date, the intensity of the radiation emitted throughthe opposite or rear face of the lamp can be as much as 70% of thatexiting the lamp through the front face. Accordingly, this lamptechnology is well-suited for use in applications that requiredouble-sided emission.

When emission of UV/VUV radiation through a single face of the lamp isdesired, a simple planar reflector can be affixed to the rear face ofthe lamp (e.g., behind the array of microcavities, on the exterior faceof the inner plate or either face of the outer plate). The planarreflector can be integrated with or affixed to the plasma lamp. Theintensity of the UV/VUV radiation that is emitted through the front faceof the plasma lamp may increase by 40% or more when a reflecting surfaceis added to the rear face of the lamp. The planar reflector may comprisea diffractive structure such that a preferred wavelength or wavelengthsis reflected preferentially by the reflector.

Referring now to FIGS. 2A and 2B, a photomicrograph of an assembled5″×5″ plasma lamp 1 (surface area of approximately 156 square cm)constructed with fused silica internal plates and external windowsaccording to the schematic of FIG. 1B is shown during operation. Theseimages provide a clear view of the microcavity pattern present in thelamp, and demonstrate the impact of the driving voltage waveform on theplasma distribution in and around the microcavities. Both FIGS. 2A and2B are micrographs of a portion of the lamp 1 surface, recorded with atelescope and a CCD camera during operation of the lamp. The lamp isoperated with xenon (Xe) gas filled to a pressure of 450 Torr and,because the emitter of interest in this case (Xe₂*) produces radiationin the VUV spectral region at 172 nm, a small amount of oxygen wasintentionally introduced to the Xe gas in the lamp so that visible(green) fluorescent light emitted from the xenon monoxide (XeO) moleculeallows for the visual assessment of lamp performance. More specifically,fluorescence emitted by the XeO* molecule allows for the visualizationof the two different-sized hemispherical microcavities 30 a, 30 b thatare present in the arrays of the lamp 1. In this image, the largercircles in the photomicrograph are the fused silica spacers 10 used toseparate the internal plates.

In FIG. 2A, a 20 Hz (1.7 kV_(RMS)) sinusoidal ac waveform is utilized asthe driving voltage to uniformly produce light emission throughout thelarger microcavities 30A in one array. Although all of the microcavitiesin the plasma lamp 1 are hemispherical in shape, the width (w_(a)) ofthe larger hemispheres 30 a is ˜2 mm whereas the diameter of the smallerhemispheres 30 b, which are situated at the intersection of four largerhemispheres, is ˜800 μm.

In FIG. 2B, the distribution of fluorescence emanating from themicrocavities 30 a, 30 b is strongly altered when a 30 kHz (1.4kV_(peak)) waveform, comprising pulses with a rise time of less than 100ns (˜1 μs in duration), is utilized as the driving voltage for the lamp.In this case, the emission is more clearly confined to the microcavitiesand the increased electric field strength generated by the pulses,combined with the parabolic transverse profile of each microcavity,intensifies emission from the center of the hemispheres. As expected,the performance of plasma lamp 1 is dependent upon the spatialdistribution and geometry of the arrays of microcavities present withinthe lamp.

A gated, intensified CCD camera can be used to observe the temporalbehavior of the arrays. Referring now to FIG. 3, a false color image isprovided in which areas 50 that are red in color represent the greatestradiation intensities observed, whereas areas 51 that are blue denotethe lowest observed emission intensities. The image shows a smallportion of two interlaced arrays (for a 100 cm² (4″×4″) lamp) in whichthe diameters of the hemispheres for the two arrays are 2 mm and 800 μm,as described above with respect to FIGS. 2A and 2B. The gas mixtureintroduced to this lamp 1 is 315 Torr of Xe and 135 Torr of Ne. The lampis powered by the application of a 20 kHz (1.8 kV_(RMS)) ac sinusoidalvoltage. For this particular microcavity array design, emission from thelarger hemisphere microcavities 30 a takes on the form of an annulus,whereas the smaller hemisphere micro-cavities 30 b produce emission in amore spatially-uniform manner. Time-resolved measurements of thefluorescence with a gated, intensified CCD camera, demonstrates that thelarger cavities 30 a ignite first as the driving voltage is risingwhereas the smaller cavities 30 b ignite later. Thus, cavities ofdifferent size interact with, and absorb power from, different portionsof the driving voltage waveform. This behavior is partially responsiblefor the high electrical efficiency of these lamps which is presently13%, but is expected to reach at least 20% in the future.

Referring now to FIG. 4, a spectrum representative of a 70/30% Xe/Ne gasmixture is shown for a plasma lamp having two interlaced arrays ofmicrocavities. The emitted radiation of the Xe₂* excimer molecule ismeasured using a VUV spectrometer and a photomultiplier. Peak emissionoccurs near 172 nm and the wavelength-integrated emission grows rapidlywith the partial pressure of the xenon gas. The spectral width of theXe₂* radiation is ˜9 nm. Measurements of the intensity of the Xe₂*emission generated by a 100 cm² (4″×4″) lamp clearly show thatmicrocavity-based lamps are capable of efficiencies, and values of totalradiated power, that have not been previously attainable. For example,measurement of the intensity and power radiated by a 100 cm² Xe₂* lampis summarized in FIG. 5. For a xenon (Xe) gas pressure in the lamp of500 Torr, intensities above 200 mW/cm² are radiated by the lamp when theinput power to the lamp is 160 W. This maximum value of intensitycorresponds to more than 20 W of power (at 173 nm) that is radiatedthrough both faces of the lamp, and the overall efficiency (VUV outputpower divided by the electrical power delivered to the lamp) is >10%.

Lamps identical in size and shape to that of FIG. 2, except having noarrays of microcavities, show a reduction in the maximum intensity andits output power to ˜70 mW/cm² and 9 W, respectively. Furthermore,without microcavities in the plasma lamp, the plasma consists entirelyof striations (“filaments”) and, thus, the spatial homogeneity of theplasma is poor. In comparison, the incorporation of one or more arraysof microcavities results in the plasma becoming a diffuse glow with theVUV output radiation being spatially uniform over the entire surface ofthe lamp.

Referring now to FIGS. 6A-6E, several possible designs (among many) forplasma lamps having one, two, or more interlaced arrays of microcavitiesare shown, without limitation, in which the range of geometries andsizes of the microcavities are varied. If the primary array comprisescylindrical, truncated cone, or paraboloidal cavities with an exitaperture (i.e., the aperture facing the output window) of w₁, then theutilization of the surface occupied by the array, as well as theelectrical utilization of the driving voltage waveform, is enhanced bythe introduction of a second or third array of microcavities.

Referring now to FIG. 7A, a plasma lamp 1 having a simplified structureis shown in which the outermost windows 20 in FIG. 1A have been removed.In this situation, the deposition of a thin film 40 of an UV/VUVtransmissive material onto the electrodes 17 is desirable to provide forlimited environmental protection. This transmissive material 40 may be,but is not limited to, an aluminum oxide or diamond film.

Referring now to FIG. 7B, an alternative structure for a plasma lamp 1is shown in which two arrays 25 a, 25 b of the microcavities 30 a, 30 bare fabricated such that one array 25 a, 25 b is provided in theinterior faces 7 of both of the inner fused silica plates 5. Themicrocavities 30 a, 30 b can be similar or different in shape and size.In FIG. 7B, the first array 25 a comprises microcavities 30 a having adepth d₁ and width w₁, while the second array 25 b comprisesmicrocavities 30 b having a depth d₂ and width w₂. By staggering orinterlacing the positions of the microcavities 30 a, 30 b on theinterior face 7 of each plate 5, the efficiency of the UV/VUV radiationthat can be emitted from the lamp 1 can be enhanced.

The last example structure shown in FIG. 7C is one in which the innerplate 5 and outer window 20 on one side of the lamp have been removed toprovide an open space or open window 65 structure. The primary functionof this structure is to avoid the absorption of lamp radiation 35 by theinternal plate 5 and external plate/window 20. This issue is ofincreasing importance as the wavelengths(s) of the radiation 35 producedby the lamp is decreased and approaches the LiF “cutoff” wavelength ofapproximately 106 nm. Emission from diatomic molecules such as H₂ andNe₂ lie at wavelengths at which virtually all window materials absorb(e.g., deep into the vacuum ultraviolet, λ<120 nm) and, as illustratedin FIG. 7C, immersing the “target” 67 and intervening region between thetarget and the lamp with the same gas 13 or gas mixture within the lamp1 is one approach to avoiding the loss of lamp power caused by windowabsorption.

FIGS. 8A and 8B illustrate, without limitation, two other specificdesign possibilities associated with the plasma lamps formed accordingto the teachings of the present disclosure. One of these designs (FIG.8A) isolates a plasma lamp 1 from a secondary chamber 75 with a window77 capable of efficiently transmitting the lamp radiation. The secondarychamber 75 may contain a gas 80 or vapor (or mixtures thereof) differentfrom the gas 13 present within the plasma lamp 1. Gas or vapor 80 isselected so that, when irradiated by radiation 35 from the plasma lamp1, a film will grow on the “target” 67 which could be, for example, asubstrate or chip for an electronic circuit. In order to reduceabsorption loss of the emitted radiation 35 from the plasma lamp 1, thelamp may be placed into a chamber 71 that can be evacuated to produce avacuum 73. A specific example would be a 172 nm lamp irradiating amixture of ammonia (NH₃) and trimethylgallium ((CH₃)₃Ga) so as to yielda thin film of gallium nitride (GaN) on the substrate.

Referring now to FIG. 8B, alternatively, a plasma lamp 1 can be designedsuch that it is well-suited for the photochemical production of variousmolecules of commercial interest. One example is that of formic acidand, in this situation, provision is made for the extraction of thephotochemical product from the gas phase. The diagram illustrates a lamp1 in which UV/VUV radiation 35 produced by the gas/gas mixture 13 withinthe lamp 1 is converted to other wavelengths by a phosphor material 90or mixture of phosphor materials deposited onto the interior faces 7 ofthe inner plates 5. The phosphor material or mixture of phosphormaterials may cover the entire interior surface 7 of the internal plates5, or it can be stenciled or patterned such that the phosphor coversonly a portion of the surface 7 of the internal plates 5. Thecomposition of the phosphor materials may include, but not be limitedto, oxides, nitrides, oxynitrides, sulfides, selenides, halides, orsilicates of zinc, cadmium, manganese, aluminum, silicon, various rareearth metals, or a mixture thereof. The phosphor material may be appliedas a single layer or as multiple layers with the composition of eachlayer being individually controlled. The thickness of the phosphorlayers may range from about 0.5 μm to about 100 μm; alternatively, itcan be between about 8 μm to about 25 μm. The phosphor layers may beapplied by any means, including screen printing, spraying, curtaincoating, dip coating, sputtering, or chemical vapor deposition.

The plasma lamps of the present disclosure are capable of emittingUV/VUV radiation in the wavelength range of about 100 nm to 400 nm;alternatively between about 126 nm to about 353 nm. In FIG. 9,representative spectra (lamp intensity plotted as a function ofwavelength) are provided for a plasma lamp having a mixture of Xe gasand iodine (I₂) vapor. The most intense feature in this spectrum is theB→X emission band of xenon monoiodide (XeI*), which peaks at 254 nm.

FIG. 10 shows the emission spectrum measured for the plasma lamp of FIG.9 when the lamp is filled with xenon (Xe) gas, and the internal surfaceof one interior plate is coated with a film of a phosphor material. Inthis case, the 172 nm emission from the Xe₂* molecule is“down-converted” to the 230-290 nm spectral region. The second trace inthis spectrum is that recorded when the phosphor material is coated ontothe outer face(s) of the lamp.

According to another aspect of the present disclosure, a method offorming a plasma lamp having a composite structure is provided.Referring to FIG. 11, the method 100 comprises providing 105 two or moreinternal plates with each of the internal plates having an interiorsurface and an exterior surface. At least one microcavity array isformed 110 in the interior surface of at least one of the internalplates. The interior surface of each internal plate is positioned 115such that it faces the interior surface of another internal plate.Alternatively, the interior surface of each internal plate is parallelto the other. Optionally, one or more spacers may be inserted 120between the inner surfaces of the internal plates, such that the spacerskeep the internal plates separated at a predetermined fixed distance.When used, at least one of the spacers is a periphery spacer placed nearthe edge of the internal plates. A hermetic seal is formed 125 betweenthe periphery seal and the internal plates, thereby creating a fixedvolume between the internal plates. A gas fill port that passes throughat least one of the internal plates is formed 130 and the fixed volumeis evacuated 135. The evacuated fixed volume is backfilled 140 with agas (or gas mixture) that is capable of producing a glow discharge.Thus, the gas is in contact with, and fills, the array of microcavities.Once the gas is backfilled 140, the gas fill port is then closed 145,thereby sealing the gas within the plasma lamp. A plurality ofelectrodes is formed 150 and connected to a power supply designed todeliver a time-varying voltage. At least one electrode is located on theexterior surface of at least one internal plate. Finally, one or moreprotective windows are placed 155 over at least one electrode;alternatively, over each electrode. Application 160 of the time-varyingvoltage to the electrodes generates a spatially uniform, glow dischargeplasma within one or more of the microcavity arrays, and the glowdischarge emits radiation lying in the UV/VUV spectral region.

Referring now to FIG. 12, a specific example of several process stepsused to fabricate the plasma lamps of the present disclosure is providedwithout limitation. Process steps shown in FIGS. 12(a-c) entail theproduction of one or more arrays of microcavities on one face of a flatplate of an optically transmissive material. Although fused silica isspecifically indicated in FIG. 12, other materials may also be used,depending on the wavelength(s) of the radiation to be emitted. Exemplarymaterials that exhibit excellent transmission over most of the VUVregion include calcium fluoride, magnesium fluoride, lithium fluorideand sapphire. The positions and transverse dimensions of themicrocavities in an array are defined by a lithographic process(illustrated in FIG. 12(a)) involving a polydimethylsiloxane (PDMS)stamp 111 and a UV-curable ink 113. The cavities themselves can beformed, without limitation, by a micropowder ablation process (see FIG.12(b)) including the use of micropowders 114 and a high resolution mask116. The depth (d) and width (w) of each microcavity (as well as, to anextent, the cavity shape) is determined by the time of exposure of themicropowder 114 jet to the surface. An UV-curable ink has been found tobe resistant to the micropowder jet and, therefore, can serve as asuitable mask 116 for the cavity fabrication process. Althoughmicropowder ablation is presented in FIG. 12(b), the formation of themicrocavity arrays by other well-known processes, including laserablation, drilling and chemical processing, to name a few, are withinthe scope of the present disclosure. FIG. 12(c) shows the completedformation of an array 25 a of microcavities 30 a in the interior surface7 of an internal plate 5.

FIG. 12(d) illustrates the insertion of a silica spacer 10 between thetwo fused silica inner plates 5 for the lamp. The spacer 10, 10 a may bea single sheet that has been machined so as to define the desired spacerpattern. Alternatively, the spacer 10, 10 a may be fused silica segments(discs, pellets, cylinders, spheres, etc.) arranged manually orrobotically on one of the fused silica windows. Regardless of theconfiguration of the spacer(s), each portion of the spacer 10, 10 a canbe, when desired, coated on both of its faces with a frit 127 designedfor firing at a temperature above 750° C.; alternatively, above 850° C.,alternatively, in the range of about 900-950° C. Alternatively, when nospacer or spacers are present, the inner plates 5 then are bondeddirectly together.

After the two inner plates of the lamp are sealed by a firing process(see FIG. 12(e)), a short length of quartz tubing is also sealed to theassembly with glass frit. The interior of the lamp is then evacuatedthrough the gas fill port 15 by a vacuum system, and is subsequentlyback-filled with the desired gas composition. In order to maximize thepurity of the gas or gas mixture in the lamp, it may be necessary tooperate the lamp after being filled with gas but before the lamp issealed. After the lamp is self-heated by the discharge, it can then beevacuated once more and then re-filled. The gas fill tube 15 is thensealed (see FIG. 12(f)), thereby trapping the gas 13 in the plasma lamp.When desirable, a small “getter” may also installed within the lamp andfired after the final gas fill is introduced to the lamp, and the lampis then sealed. The function of the getter is to remove residualimpurities (such as water vapor, O₂, N₂, etc.) that have a deleteriouseffect on lamp performance. One example of a commercially-availablegetter is the barium getter marketed worldwide by SAES.

FIGS. 12(g-i) illustrate the formation of a metal grid electrode on theouter face of both inner plates (windows) of the lamp. In FIG. 12(g), aCr/Ni layer 117 is deposited onto the external surface 8 of the fusedinternal silica plates 5. A photolithographic patterning process (FIG.12(h)) may be utilized without limitation to form the Cr/Ni layer into apatterned electrode 17. The assembly process may optionally concludewith sealing two additional quartz windows 20 onto the lamp 1 exterior(see FIG. 12(i)). These exterior windows 20 may serve to assist inprotecting the electrodes. As noted previously, these additional windowscan be discarded if the lamp power they absorb (owing to color centerformation) is objectionable. Thus, when desirable, the additional orprotective windows may be absent or not used in forming the plasma lamp.

The following specific examples are given to illustrate the use of theplasma lamps of the present disclosure, as well as the products formedtherefrom, and should not be construed as limiting the scope of thedisclosure. Those skilled-in-the-art, in light of the presentdisclosure, will appreciate that many changes can be made in thespecific embodiments which are disclosed herein and still obtain alikeor similar results without departing from, or exceeding, the spirit orscope of the disclosure. One skilled in the art will further understandthat any properties reported herein represent properties that areroutinely measured and can be obtained by multiple different methods.The methods described herein represent one such method and other methodsmay be utilized without exceeding the scope of the present disclosure.

Referring now to FIGS. 13-17, the use of the plasma lamps 5 preparedaccording to the method described above, and as further defined herein,are highlighted in several applications, without limitation. One suchapplication as described in FIGS. 13a-14b includes, but is not limitedto, the disinfection and treatment of water. Owing to the planar natureof the VUV-emitting lamps 1, multiple lamps 1 can be positioned so as tobe parallel, thereby allowing water 200 to pass between the planar lamps1 in a channel 201. One skilled in the art will understand that if orwhen desired, the plasma lamp may comprise a curved surface. UV/VUVradiation 35 emitted from the plasma generated in the lamps 1 destroysbacteria and pathogens in the water 200. This UV/VUV radiation 35 isalso capable of effecting photochemical reactions that will dissociate(break apart) undesirable molecules in waste water 200 such as aromatichydrocarbons. Because the lamps are flat, the distance between the lampsis a constant which stands in contrast to cylindrical lamps placed inany geometrical arrangement in which their axes are parallel. Thedistance between the lamps 1 may range from about 0.5 mm to about 50 mm;alternatively, between about 0.5 mm and 10 mm. Optionally, the pluralityof plasma lamps may be located within a light reflective bath 205, or aflow cell 207 that may be bonded to the lamps 1 and/or form a channelarray 209. In addition, nitrogen or another relatively inert gas 210 maybe bubbled through the flowing water 200.

In FIG. 15, a diagram of a miniature water disinfection system 290,designed to be lightweight and portable, is illustrated. Although thesystem 290 may be any size desired, a size that is both lightweight andportable may have a diameter that is in the range of about 10 to 12 cm.This water disinfection system 290 comprises a pretreatment compartment305 for field or waste water 300 a, a pre-filter 302 a, a watertreatment compartment 310 that comprises at least one plasma lamp 1 anda water treatment chamber 315, wherein UV/VUV radiation 35 arising fromthe plasma lamp 1 interacts with the waste water 300 a, thereby treating(disinfecting, reducing organic molecule concentration, etc.) the wastewater 300 a. The plasma lamp can be powered by a power circuit and abattery pack 318, rendering the system completely portable. The treatedwater 300 b passes through a second filter 302 b and into a purifiedwater reservoir 320. The pre-treatment compartment 305 may optionallycomprise a compact solar panel or battery compartment 325, whendesirable.

FIG. 16 is a diagram describing another aspect of the present disclosurewhich is capable of producing UV/VUV radiation in two or more spectralregions 35 a, 35 b. The flat geometry of the plasma lamp 1 surface canbe segmented, in order for different regions of the lamp to be devotedto the generation of distinct wavelengths. A UV conversion phosphormaterial 127 may be coated onto a portion of the interior surface 7 ofan internal plate 5 in order to cause a change in the wavelength of theemitted UV/VUV radiation 35 a, 35 b. The availability, from a single,compact lamp, of UV and/or VUV photons in two or more separate regionsof the spectrum is of considerable value for applications includingdisinfection (because different pathogens are deactivated preferentiallyat different wavelengths) and biomedical diagnostics in whichchromophore “tagged” biological molecules emit visible fluorescence inresponse to the absorption of UV or VUV photons. It should be noted thatattempting to coat different regions on the interior surface of acylindrical lamp with different phosphors is fraught with difficulty,but doing so on the interior surface of a flat lamp prior to lampassembly is comparatively straightforward.

In FIG. 17, a system 400 for generating ozone (O3) within the air intakeof an automobile engine is illustrated. Due to the high efficiency andcompact nature of plasma lamps 1 of the present disclosure, it is nowpractical to situate a small Xe₂* (172 nm) emitting lamp 1 in theautomobile engine. The exposure of 172 nm radiation 35 to conventionalair produces ozone efficiently. Stated another way, it is known that theoxygen in air absorbs strongly at the 172 nm wavelength of the Xe dimerlamp. When oxygen absorbs a 172 nm photon, the molecule is dissociatedinto two free oxygen atoms. The interaction of these free atoms withoxygen molecules produces ozone. Because ozone is known to increase thegas mileage of automobiles, the introduction of an efficient 172 nm lampinto the air-intake 405, located immediately prior to the combustionprocess and downstream of the throttle valve 410, is expected to providean economical system for increasing significantly the mileage of allautomobiles. A similar system is expected to also be effective inimproving the mileage of trucks, busses, and all vehicles (tractors,aircraft, etc.) and products (mowers, trimmers, etc.) that require aninternal combustion engine. For larger engines in which the air flow ishigher, an array of lamps or a single larger lamp may be required. Itshould also be mentioned that ozone is not only believed to increase themileage of automobiles, trucks, etc. because it improves the combustionprocess, it also increases the power produced by the engine for a givenamount of fuel consumed per engine cycle. Therefore, the increased powerproduced by the engine is expected to be of particular value foraircraft (propeller-driven as well as jets) and, for a given amount ofhorsepower from a conventional internal combustion engine, this benefitof ozone-assisted combustion will reduce fuel consumption further.

Within this specification, embodiments have been described in a mannerwhich enables a clear and concise specification to be written, but it isintended, and will be appreciated by artisans, that embodiments may bevariously combined or separated without departing from the invention.For example, it will be appreciated that all preferred featuresdescribed herein are applicable to all aspects of the inventiondescribed herein.

The foregoing description of various forms of the invention has beenpresented for purposes of illustration and description. It is notintended to be exhaustive or to limit the invention to the precise formsdisclosed. Numerous modifications or variations are possible in light ofthe above teachings. The forms discussed were chosen and described toprovide the best illustration of the principles of the invention and itspractical application to enable one of ordinary skill in the art toutilize the invention in various forms and with various modifications asare suited to the particular use contemplated. All such modificationsand variations are within the scope of the invention as determined bythe appended claims when interpreted in accordance with the breadth towhich they are fairly, legally, and equitably entitled.

What is claimed is:
 1. A product that includes at least oneUV/VUV-emitting plasma lamp; the plasma lamp comprising: two or moreinternal plates, each internal plate having an interior surface and anexterior surface; the internal surface of each internal plate beingpositioned approximately parallel to and separated by a predetermineddistance from the internal surface of another internal plate, such thata fixed volume is formed between the internal plates; at least one arrayof microcavities formed in the interior surface of at least one of theinternal plates, the microcavities in the at least one array comprisinga geometric shape having a predetermined primary spatial width that isin the range of about 3 μm to about 5,000 μm and/or a predeterminedspatial depth that is in the range of about 1 μm to about 1,000 μm; agas or mixture of gases in which a glow discharge (plasma) is produced;the gas occupying the fixed volume between the internal plates and beingin contact with the at least one array of microcavities; and a pluralityof electrodes connected to a power supply designed to deliver atime-varying voltage; wherein the time-varying voltage interacts withthe gas, such that a spatially uniform, glow discharge (plasma) isformed both within the microcavities and the fixed volume between theinternal plates, the glow discharge (plasma) producing radiation that ispredominantly in the UV/VUV spectral region with at least a portion ofthe radiation being emitted from the plasma lamp.
 2. The productaccording to claim 1, wherein the predetermined distance is defined byone or more spacers located between the interior surfaces of theinternal plates, wherein at least one spacer is a periphery spacerplaced near the edge of the internal plates, the periphery spacerforming a hermetic seal with the internal plates.
 3. The productaccording to claim 2, wherein the spacers are either part of amonolithic structure that exhibits a predetermined spacer pattern ordiscrete structures having the shape of a disc, a sphere, a pellet, acylinder, a cube, or a mixture thereof.
 4. The product according toclaim 1, wherein one or more of the internal plates are individuallyselected to comprise a UV/VUV radiation transmissive material such asfused silica, quartz, sapphire, or magnesium fluoride, and at least oneof the plurality of electrodes exhibits a transparency to UV/VUVradiation of 90% or more.
 5. The product according to claim 4, whereinat least one of the plurality of electrodes is located on the exteriorsurface of at least one of the internal plates.
 6. The product accordingto claim 5, wherein one or more protective windows in the form of atransparent plate or a coating are placed on the opposite side of the atleast one electrode on the exterior surface in order to provideenvironmental and safety protection thereto.
 7. The product according toclaim 1, wherein the spatial depth is between about 5 μm to about 600 μmand/or the spatial width is between about 5 μm to about 1,500 μm.
 8. Theproduct according to claim 1, wherein the geometric shape of themicrocavities is one selected from the group of a cylinder, hemisphere,a half-cylinder, an ellipsoid, a truncated cone, a paraboloid, atruncated paraboloid, and a cube.
 9. The product according to claim 1,wherein the plasma lamp has a thickness that is about 6 mm or less; theplasma lamp being either planar or comprising a curved surface.
 10. Theproduct according to claim 1, wherein the gas comprises one or morenoble gases, one or more halogen-containing molecular gases, or amixture of at least one halogen-containing gas with the one or morenoble gases.
 11. The product according to claim 10, wherein the glowdischarge (plasma) produces molecules from the gas that emit UV/VUVradiation having a peak wavelength; the molecules (and their associatedpeak wavelengths) being selected from the group of NeF* (108 nm), Ar₂*(126 nm), Kr₂* (146 nm), F₂* (158 nm), ArBr* (165 nm), Xe₂* (172 nm),ArCl* (175 nm), KrI* (190 nm), ArF* (193 nm), KrBr* (207 nm), KrCl* (222nm), KrF* (248 nm), XeI* (254 nm), Cl₂* (258 nm), XeBr* (282 nm), Br₂*(289 nm), ArD* (290-300 nm), XeCl* (308 nm), I₂* (342 nm), and XeF*(351, 353 nm).
 12. The product according to claim 1, wherein the plasmalamp further comprises a planar reflector or a reflecting surfacepositioned so as to increase the power of the UV/VUV radiation emittedfrom the lamp.
 13. The product according to claim 11, wherein the planarreflector comprises a diffractive structure, such that at least onepreferred wavelength is reflected preferentially by the planarreflector.
 14. The product according to claim 1, wherein the plasma lampemits an average output intensity that is greater than 200 mW/cm² and apeak power that is greater than approximately 1 kW when the gas is xenon(or a Ne/Xe or Ar/Xe mixture) and the UV/VUV radiation is emittedpredominantly from the Xe₂* excimer molecule at a peak wavelength ofabout 172 nm.
 15. The product according to claim 1, wherein the plasmalamp further comprises one or more UV/VUV-to-UV or UV/VUV-to-visibleconversion phosphor materials located on the interior surface of atleast a portion of at least one of the internal plates.
 16. The productaccording to claim 1, wherein the plasma lamp comprises at least twodifferent arrays of microcavities, such that the microcavities in thedifferent arrays exhibit a different geometric shape, primary spatialwidth, spatial depth, or a combination thereof.
 17. The productaccording to claim 16, wherein the different arrays of microcavities arespatially separated on the interior surface of the internal plate, orinterlaced or interwoven, such that the microcavities in one array arealternated or staggered with the microcavities of another array.
 18. Theproduct according to claim 16, wherein the product produces radiationsimultaneously in two or more wavelength ranges within the UV/VUVspectral region.
 19. The product according to claim 1, wherein theproduct is used to disinfect potable water; disinfect medical devices,clothing, or surfaces; deactivate biological pathogens; treat wastewater; desorb contaminants or hydrocarbons from an internal surface of achamber or the surface of a component or tool used in a cleanroom orsurgical environment; generate ozone near the air intake of an internalcombustion engine or a jet engine; or cure a coating composition afterit has been applied to a surface of a substrate.
 20. The productaccording to claim 1, wherein the product comprises a plurality ofplasma lamps that are tiled in order to realize an emitting surface thatproduces an average power between 10 W and 10 kW in the UV/VUV spectralrange.
 21. A product that includes at least one plasma lamp; the plasmalamp comprising: two or more internal plates with one or more of theinternal plates being individually selected to comprise a UV/VUVradiation transmissive material; each internal plate having an interiorsurface and an exterior surface; the internal surface of each internalplate being positioned approximately parallel to and separated by apredetermined distance from the internal surface of another internalplate, such that a fixed volume is formed between the internal plates;the predetermined distance being defined by one or more spacers locatedbetween the interior surfaces of the internal plates, wherein at leastone spacer is a periphery spacer placed near the edge of the internalplates, the periphery spacer forming a hermetic seal with the internalplates; one or more UV conversion phosphor materials located on theinterior surface of at least a portion of at least one of the internalplates; at least one array of microcavities formed in the interiorsurface of at least one of the internal plates, the microcavities in theat least one array comprising a geometric shape having a predeterminedprimary spatial width that is in the range of about 5 μm to about 1,500μm and/or a predetermined spatial depth that is in the range of about 5μm to about 600 μm; a gas in which a glow discharge (plasma) isproduced, the gas comprising one or more noble gases, one or morehalogen-containing molecular gases, or a mixture of at least onehalogen-containing gas with the one or more noble gases; the gasoccupying the fixed volume between the internal plates and being incontact with the at least one array of microcavities; and a plurality ofelectrodes connected to a power supply designed to deliver atime-varying voltage; at least one of the plurality of electrodesexhibits a transparency to UV/VUV radiation of 90% or more; wherein thetime-varying voltage interacts with the gas, such that a spatiallyuniform, glow discharge (plasma) is formed both within the microcavitiesand the fixed volume between the internal plates, the glow discharge(plasma) producing radiation that is in the UV/VUV spectral region withat least a portion of the radiation being emitted from the plasma lamp;22. The product according to claim 21, wherein the plasma lamp comprisesat least two different arrays of microcavities, such that themicrocavities in the different arrays exhibit a different geometricshape, primary spatial width, spatial depth, or a combination thereof;wherein the different arrays of microcavities are spatially separated onthe interior surface of the internal plate, or interlaced or interwoven,such that the microcavities in one array are alternated or staggeredwith the microcavities of another array.